Single- and multi-stage high Vacuum Machines
PHV high vacuum pumps
Two-stage oil-flooded rotary vane vacuum pumps of the PHV series were developed to achieve higher vacuum capacities. Installation, operation and maintenance have been simplified. The pumps were developed for the laboratory use. Fields of application in the semiconductor industry, X-ray tubes, measuring instruments, light bulbs, fluorescent lighting, distillation, cooling devices, cold dryers, mass spectrometers are known.
The pumps are equipped with an oil check valve, gas ballast valve and ISO KF clamps. Pump and motor are connected by an elastic coupling.
Aufbau:
- Intake port
- Suction sieve
- Check valve
- Machine housing
- Pump housing
- Rotor
- Lamella
- Oil container
- Machine foot
- Gas ballast valve
- Inflow channel
- Exhaust valve
- Valve bracket
- Exhaust valve plate
- Exhaust channel
PHV 5 – 10 – 20 – 30 PHV 50 – 75
For a further overview of the PHV high vacuum pumps and their accessories as well as the curves and technical data, please click on the respective images to consult their data sheets.